Fab Equipment List for Batch Sale
Photolithography, Wet Chemistry
• Karl Suss MA6 Aligner
• Karl Suss MJB3 Aligners (2)
• C&D 4" Developer Track (Model 8632-CTD-DD)
• SVG 4" Coater Track (Model 8626/8636)
• Cambridge EBMF 10.5 e-beam lithography system
• Semitrack 3" Coater Track
• Manual Spinner plus Table and Hood
• Acid Bench and Hood
• Solvent Bench and Hood
• Chemical Storage Cabinets (5)
• VWR Explosion Proof Refrigerator
Coating and Heat Treatment
• Temescal e-beam evaporator (FC-1800)
• CHA e-beam evaporator (SEC 1000 RAP)
• TFE 2454 Sputtering
• Wafab Plating Station (Bench and Hood)
• YES Polyimide Oven (Model YES-5)
• Modular Process RTA (Tsunami RTP-600S)
• Plasmatherm Series VII PECVD
• Manual VCSEL wet oxidation station (California Scientific)
Dry Etch Equipments
• Unaxis Shuttlelock ICP RIE
• Plasmatherm Series VII RIE
• Gas Cabinets (4)
Other Wafer Processing Metrology Equipment
• Hitachi Scanning Electron Microscope (Model S-4500)
• Ambios Surface Scan (Model XP-2)
• KLA-Tencor Profilometer (Model P6)
• Rudolph Ellipsometer (Model NIR-3)
• Nanospec (Nanometrics NanoSpec/AFT)
• March Asher (Model PX500)
• G & N Grinder
• Dynatex GST-100 Scriber
• Westbond 7416 Bonder
• Unitek Welder (Model Unibond II)
• Hall Measurement System (Accent HL5500PC)
• X-Ray Diffractometry System (Bede QC200)
• Contactless Resistance Measurement System (Lehighton 1510C-RP)
• Atomic Force Microscope (PSIA Model XE-100)
• Tektronix Curve Tracer (370 A) with Micromanipulator Probe Station
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