4寸Gan 整廠設備 for sale

Fab Equipment List for Batch Sale 

 

Photolithography, Wet Chemistry

• Karl Suss MA6 Aligner

• Karl Suss MJB3 Aligners (2)

• C&D 4" Developer Track (Model 8632-CTD-DD)

• SVG 4" Coater Track (Model 8626/8636)

• Cambridge EBMF 10.5 e-beam lithography system

• Semitrack 3" Coater Track

• Manual Spinner plus Table and Hood

• Acid Bench and Hood

• Solvent Bench and Hood

• Chemical Storage Cabinets (5)

• VWR Explosion Proof Refrigerator

 

Coating and Heat Treatment

• Temescal e-beam evaporator (FC-1800)

• CHA e-beam evaporator (SEC 1000 RAP)

• TFE 2454 Sputtering

• Wafab Plating Station (Bench and Hood)

• YES Polyimide Oven (Model YES-5)

• Modular Process RTA (Tsunami RTP-600S)

• Plasmatherm Series VII PECVD

• Manual VCSEL wet oxidation station (California Scientific)

 

Dry Etch Equipments

• Unaxis Shuttlelock ICP RIE

• Plasmatherm Series VII RIE

• Gas Cabinets (4)

 

Other Wafer Processing Metrology Equipment

• Hitachi Scanning Electron Microscope (Model S-4500)

• Ambios Surface Scan (Model XP-2)

• KLA-Tencor Profilometer (Model P6)

• Rudolph Ellipsometer (Model NIR-3)

• Nanospec (Nanometrics NanoSpec/AFT)

• March Asher (Model PX500)

• G & N Grinder

• Dynatex GST-100 Scriber

• Westbond 7416 Bonder

• Unitek Welder (Model Unibond II)

• Hall Measurement System (Accent HL5500PC)

• X-Ray Diffractometry System (Bede QC200)

• Contactless Resistance Measurement System (Lehighton 1510C-RP)

• Atomic Force Microscope (PSIA Model XE-100)

• Tektronix Curve Tracer (370 A) with Micromanipulator Probe Station