Seller stated that tool is still installed and running, being used for epitaxy of GaN-based LED wafers. This comes with all the peripherals in complete condition. Also, one spare reactor module, spare gas delivery system (MFCs, PCs, valves etc.) and a plethora of different spare parts such as quartz and graphite reactor components are included.
Current user is upgrading their entire MOCVD line and is hearing offers for a quick buyer who can move forward with paperwork within this month as they want to write this asset off from their book by end of May. Actual removal/dismantle schedule should be discussed but would be available within 1~2month. Please review the detail below and contact me if you are interested in making offer or have any question.
AIXTRON AIX 2600 G3 HT MOCVD System
III-N Process
Planetary reactor
With (8) satellites, 1" x 4" / 3" x 2"
Up to 8" x 4" / 24" x 2"
Maximum process temperature: 1200°C
(8) MO Sources
(6) Standards
(2) Diluted
TMGa
TEGa
TMAl
(2) TMIn
Cp2Mg
NH3, Single line
(2) MFCs
SiH4, Two lines
H2 Purifier
Palladium diffusion cell
N2 and NH3 Purifier
MBRAUN Glovebox
EBARA Dry process pump
HUTTINGER RF Generator
Reactor ceiling
With viewport
LAYTEC Epicurve Reflectometry / Pyrometry / In-situ bow measurement
LAUDA Baths for MO sources
Spare parts included:
Pneumatic valves with ¼" VCR fittings
Mass flow controllers (Yellow sleeve)
Exhaust system components, DN25 and DN40 flanges
(2) ¼" Piping
Manual valves
Pressure transducers for H2/N2/NH3 inlet
Purge units for toxic/flammable gases
MFC electrical connectors
MFC interfaces
Exhaust system components
Electronic valves
MKS Baratron
Hydrogen purifier
Nitrogen and ammonia purifiers
Glovebox filter unit
Reactor components:
Graphite satellites
Cover segments
Quartz parts
2006 vintage.
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