LPE PE 3061D EPI Reactor for sale

Hope you are well. We have a complete, running LPE PE 3061D EPI Reactor for sale. Are you still in the market? I recall you were looking for one in the past. If you have any surplus/idled equipment for sale. Please advise as well.

LPE PE 3061D EPI Reactor

GENMARK Robot

Controller

(2) PCs

Gas: H2, N2, HC1, PH3, B2H6, PH3

2006 vintage.

Comments

releasing a PLASMA ETCH PE-100.

Our User supplier is releasing a PLASMA ETCH PE-100. Please see relevant information below, the PC is not included Is the system in running condition, with a pump? There is no pump with this tool. The PE100 was in working condition when decommissioned. We'll try to hook up a pump and test the unit still works and advise in a day or so. How many kHz? Or 13.56MHz? 13.56 MHZ, 0 - 300 W PC included? We do not have the PC, but any m/c with WIN7 or higher should work. We can supply the software installation files. Any known issues? Tool was in working condition before decommissioning Asking price? £15.000 plus transport costs

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