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請問您有 ULVAC 820 的具體配置嗎?

 










Comments

有詳細配置嗎? 包含說設備的型號 是哪一種Etcher
上面是製作流程,想知道他 chamber 的 process 是甚麼
客人想確認以下三點可以做到嗎?
1. 需要一個刻蝕腔+Al,Ni,Ti,Ag 濺射
2. 需要是背晶工藝的機台
3. 是否有用ESC(靜電吸盤)
他是八吋還是六吋的呢

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