AMAT / APPLIED MATERIALS / AKT Lot of spare parts Qty / Make / Model / Part number / Description
(1) / BROOKS AUTOMATION / GF100CXXC (CHF3) / - / -
(1) / MKS / 625A-13127 / - / 10 Torr
(1) / MKS / 628A-1TBF / - / 1 Torr
(1) / MKS / - / 127AA-00100B / 100 Torr
(1) / AERA / FC-7800CU / - / N2 1SLM
(1) / AERA / FC-7810CU / - / 02 20SLM
(1) / AERA / FC-7800CU / - / CF4 500SCCM
(2) / ASP / - / - / Lifter assemblies (Motor and driver)
(1) / - / - / - / Pivot, wrist assembly HP / VHP+
(2) / - / - / - / Producer front load lock and buffer slit valves
(1) / MKS / - / 625A-14375 / 10 Torr
(1) / MKS / Baratron 628B 1TBF1B / - / Capacitance manometer
(1) / MKS / Baratron 127AA-000100B / - / 10 Torr
(1) / - / - / - / Pivot, wrist assembly HP / VHP+ Enf effector
(1) / MKS / - / 640A-22577 / -.
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