Our supplier is offering a AMAT / APPLIED MATERIALS Centura DPS G5 Poly Etcher that was removed from the fab facility.
Please review the specs and photos showing the current state, they will be reviewing offers.
AMAT / APPLIED MATERIALS Centura DPS G5 Poly etcher, 12"
Sub process: DCCP
SMIF / FOUP
Load module:
(3) TDK G1 Load ports
KAWASAKI NT520 Load arm
Transfer module:
(2) AMAT / APPLIED MATERIALS VHP Robots
(2) ALCATEL / ADIXEN / PFEIFFER A100L Dry pumps
Process module:
(3) Poly chambers: A, B, C
(3) EDWARDS iH1000C Pumps
(2) ADVANCED ENERGY Apex 1513 / Apex 3013 RF Generators
(4) Gas boxes
(2) PC
Utility:
Distribution panel
ETC
Spare parts
No Hard Disk Drive (HDD)
Operating system: Windows
Power supply: 208 V
2008 vintage.
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