AMAT / APPLIED MATERIALS Centura DPS G5

Our supplier is offering a AMAT / APPLIED MATERIALS Centura DPS G5 Poly Etcher that was removed from the fab facility.

Please review the specs and photos showing the current state, they will be reviewing offers.

AMAT / APPLIED MATERIALS Centura DPS G5 Poly etcher, 12"
Sub process: DCCP
SMIF / FOUP

Load module:
(3) TDK G1 Load ports
KAWASAKI NT520 Load arm

Transfer module:
(2) AMAT / APPLIED MATERIALS VHP Robots
(2) ALCATEL / ADIXEN / PFEIFFER A100L Dry pumps

Process module:
(3) Poly chambers: A, B, C
(3) EDWARDS iH1000C Pumps
(2) ADVANCED ENERGY Apex 1513 / Apex 3013 RF Generators
(4) Gas boxes
(2) PC

Utility:
Distribution panel
ETC
Spare parts

No Hard Disk Drive (HDD)
Operating system: Windows
Power supply: 208 V
2008 vintage.

Comments

releasing a PLASMA ETCH PE-100.

Our User supplier is releasing a PLASMA ETCH PE-100. Please see relevant information below, the PC is not included Is the system in running condition, with a pump? There is no pump with this tool. The PE100 was in working condition when decommissioned. We'll try to hook up a pump and test the unit still works and advise in a day or so. How many kHz? Or 13.56MHz? 13.56 MHZ, 0 - 300 W PC included? We do not have the PC, but any m/c with WIN7 or higher should work. We can supply the software installation files. Any known issues? Tool was in working condition before decommissioning Asking price? £15.000 plus transport costs

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