We are bringing the below ULVAC FRE-200E XeF2 Etch release cluster tool to the open market. The unit was removed from and end-user in US a few years ago and is sitting at a refurbisher who does not typically deal with Ulvac and would like to get this sold and out of their inventory. The was a fully running and complete unit at the time of removal. The unit was de-installed by the OEM and is vapor bagged and sitting in a temperature-controlled warehouse.
Per the supplier stated that the unit was only used for R&D purposes and is a like new tool.
They are looking for offer at or above $175K
Please review the below listing and let us know if you have interest in a purchase.
ULVAC FRE-200E XeF2 Etch release cluster
RF Power supply
Full load current: 142 A
Maximum load: 15.5 A
Over current protective: 250 A
Short circuit current rate: 5 Ka
Power supply: 280 V, 3 Phase, 60 Hz, 3 Wire+ G Line.
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