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Varian E500 HP Spare Parts for Sale

 Our client just released this list of Varian E500 HP spare parts for a price of $250K. All of these parts are in good condition and have been kept in our seller's stock-room to service their implanter. These are all parts that were intended to be used to be serviced. Most are new or refurbished. 


Please review the list and let me know if you're interested. If you have any questions, please let me know. 

Also, let me know if you're looking to buy/sell any other equipment. 

VARIAN Spare parts for E500
Qty / Part number / Description
(2) / E17017510 / Locks, connector, source, filament
(2) / E17036920 / Plates, side, arc chamber
(1) / E17036971 / Strap, reflector, dual vaporizer
(1) / E17121420 / Strap, reflector, bernas source
(1) / E17121430 / Spring, filament, right Hand
(1) / E17121431 / Spring, filament, left Hand
(1) / E35000167 / Boot, rubber
(2) / E35000197 / Seals, fluoroloy, spring Loaded, +650 to -4
(2) / E35000349 / Seal assemblies, fluoraloy
(22) / E35000404 / Seal, fluorocarbon, AR10401-210 UC
(1) / E35000405 / Seals, fluoro, radial, 0.124 ID, coated
(1) / E35000417 / Seals, fluoro, 0.987 ID x 1.243 OD, .151 L
(3) / 3320607 / Screw, vented, socket Head, 6-32 x 7/16 L
(1) / E17034940 / Shim, pinion, collar
(1) / E35000430 / O-Ring, buna, 0.094 ID x 0.016 W
(1) / E40000144 / Spring, associated, C0180-0
(1) / E40000317 / Spring, compression, 0.42 OD x 0.62 L
(1) / E42000044 / Bushing, bronze, oil Imp, 5/16" Shaft, 3/8 OD
(2) / E42000093 / Bearings, 1/8 x 1/8 LG
(5) / E43000005 / Rings, retaining, E-type, 0.125 Shaft
(2) / E43000020 / Rings, retaining, internal, 1.18 Housing
(2) / E43000024 / Rings, retaining, 0.250 Shaft
(6) / E43000047 / Rings, retaining, spiral, .812 bore, 1.000 housing
(2) / E43000050 / Rings, retaining, Beryllium Copper, 0.188 S
(2) / E43000078 / Rings, retaining, internal, 1.250 housing
(2) / E43000085 / Rings, retaining, internal, 1.00 housing
(2) / E43000090 / Rings, retaining, beveled, 1.000 shaft
(2) / E43000097 / Rings, retaining, 0.500 shaft
(4) / E43000104 / Springs, pin
(4) / E43000137 / Pins, dowel, 1/16 x 3/16
(1) / E43000155 / Ring, retaining, spiral, 1.50 ID ring, RE
(1) / E43000156 / Ring, retaining, spiral, 1.062", housing bore
(1) / E43000157 / Dowel pin
(4) / E43000170 / Rings, retaining, Beryllium Copper, .125 S
(2) / E43000259 / Rings, retaining, internal, 0.500 housing
(5) / E47000313 / Screws, cap, socket head, hex, 6-32 x 7/8
(3) / 2111052 / -
(4) / 2866079 / Standoff, ceramic, 1-1/2 x 3/8
(1) / E12000230 / Standoff, suppression, manipulator
(1) / E12008300 / Gear, orient drive, modified maxon
(2) / E17014840 / Feedthru, source, filament
(5) / E17036930 / Clamps, filament, bernas
(6) / E17143760 / Rods, retaining, arc chamber, source
(1) / E40000075 / Spring, wave, carbon Steel, 3.25 , 4 waves
(12) / E59000002 / Standoff, ceramic, 1/2" L, 3/8" OD, 6-32 THD
(9) / E59000010 / Standoff, ceramic, insulators, 3/4" OD x 2" L
(6) / E59000011 / Standoff, ceramic, smith, 2 L x 3/8 OD
(3) / E17183480 / Shield, insulating, suppression Fee
(3) / E59000021 / Standoff, Ceramic, 1-1/4" L x 3/8" OD
(6) / Y0200023761 / Screws, CSK HD M3*8 Aluminium
(6) / 2541122 / O-Rings, Viton, 1 1/8 ID
(6) / 2542041 / O-Rings, Viton, 3 ID
(1) / 2541157 / O-Ring, Buna-N 4 1/2 x 0.103 W
(3) / 2541204 / O-Rings, buna N, 3/8 ID
(7) / 2542224 / O-Rings, Viton, 1.734
(1) / 2542264 / O-Ring, Viton, 7.484" ID x 0.139
(2) / 2542370 / O-Rings, viton, 8-1/4 ID
(3) / 2542381 / O-Rings, viton, 11.975 ID
(2) / 2543016 / O-Rings, Silicon, 0.614" ID x 1/16" W
(2) / 2543119 / O-Rings, Viton, 11.475 ID x 0.210 W, 60 Duro
(2) / 2740960 / O-Rings, Viton, 7/8 ID
(2) / 2541202L / O-Rings, buna N, 1/4 ID
(4) / E35000007 / O-Rings, Viton, 5/16 ID x 3/32 W
(2) / E35000010 / O-Rings, Viton, 2-3/4 ID
(2) / E35000011 / O-Rings, buna, 3-1/4 ID
(1) / E35000020 / O-Ring, Viton, 3 Id x 1/8 W, deflashed
(5) / E35000027 / O-Ring, VARIAN 953-5073 1-3
(1) / E35000033 / O-Ring, buna, 5-1/4 ID
(1) / E35000042 / O-Ring, buna, 2-278 ID
(1) / E35000045 / O-Ring, Viton, 2-1/2 ID
(1) / E35000047 / O-Ring, buna, 7 ID x 1/8 W
(1) / E35000049 / O-Ring, Viton, 1-3/4 ID
(3) / E35000064 / O-Rings, buna, 2-1/2 ID
(11) / E35000067 / O-Rings, buna, 3/8 ID
(2) / E35000078 / O-Rings, buna, 1-5/8 ID
(1) / E35000080 / O-Ring, replaced by E35000562
(1) / E35000086 / O-Ring, buna, 4-5/8 Id
(1) / E35000088 / O-Ring, buna, 3-3/8" ID
(1) / E35000091 / O-Ring, buna, 1-11/16
(10) / E35000096 / O-Rings, buna, 1/4 ID x 1/16 W, deflashed
(4) / E35000104 / O-Rings, buna, .4 ID
(5) / E35000108 / O-Rings, buna, 3/16 ID
(10) / E35000134 / O-Rings, buna, 14 ID
(1) / E35000135 / O-Ring, buna, 17 ID
(4) / E35000136 / O-Rings, buna, 3/4 ID
(3) / E35000139 / O-Rings, buna, 5/8 ID
(2) / E35000146. / O-Rings, Viton, 3-3/4 ID
(1) / E35000149 / O-Ring, Viton, 8-3/4 ID
(3) / E35000154 / O-Rings, buna, 1/2 ID
(1) / E35000165 / O-Ring, buna, 3/16 ID x 3/32 W
(2) / E35000166 / O-Rings, Viton, 15 ID
(10) / E35000183 / O-Rings, buna, 18.5 ID x 0.139 OD
(8) / E35000184 / O-Rings, buna, 17.62 ID x 0.139 OD
(1) / E35000186 / O-Ring, buna, 21 ID
(2) / E35000187 / O-Rings, buna, 2-1/2 ID x 1/16 W
(4) / E35000188 / O-Rings, Viton, 2-113 (0.549 ID x 0.103 W)
(9) / E35000189 / O-Rings, Viton, 0.487
(2) / E35000190 / O-Rings, Viton, 0.859" ID x 0.139" W (Nominal)
(1) / E35000191 / O-Ring, Viton, 7-1/4 ID
(7) / E35000192 / O-Rings, Viton, 0.237 x O.103
(2) / E35000206 / O-Rings, Viton, 0.364 ID x 0.070 W
(1) / E35000208 / O-Ring, buna, 1.489 ID
(1) / E35000210 / O-Ring, buna, 15/16 ID
(3) / E35000220 / O-Rings, buna, 0.859
(5) / E35000222 / O-Rings, Viton, 4.109 x 0.139
(6) / E35000225 / O-Rings, Viton, 1-1/16 ID x 3/32 W
(1) / E35000231 / O-Ring, Viton, 3.25 ID
(2) / E35000233 / O-Rings, Viton, 1.984"
(2) / E35000234 / O-Rings, Viton, 9.984
(2) / E35000236 / O-Rings, Viton, 8-1/2 ID
(1) / E35000237 / O-Ring, Viton, 9-1/4 ID
(1) / E35000238 / O-Ring, Viton, 2-005
(6) / E35000241 / O-Rings, Viton, 1/4 ID x 3/8 x 1/16
(2) / E35000245 / O-Rings, Viton, 0.676
(1) / E35000249 / O-Ring, Viton, 2 ID x 1/6 W
(1) / E35000250 / O-Ring, Viton, 2-1/8 ID
(5) / E35000254 / O-Rings, Viton, 3/8 ID x 3/32 W
(6) / E35000259 / O-Rings, Viton, ID 1.674 x 0.103 W
(4) / E35000265 / O-Rings, Viton, 3/4 ID
(1) / E35000279 / O-Ring, Viton, 4-5/8 ID
(2) / E35000280 / O-Rings, Viton, 4.734
(1) / E35000283 / O-Ring, Viton, 5.234
(7) / E35000286 / O-Rings, Viton
(2) / E35000287 / O-Rings, Viton, 6.734
(2) / E35000288 / O-Rings, Viton, 6.984
(1) / E35000310 / O-Ring, Viton, 9.475
(1) / E35000322 / O-Ring, Viton, 2.609
(1) / E35000323 / O-Ring, Viton, 3.734
(1) / E35000327 / O-Ring, Viton 2-374
(2) / E35000329 / O-Rings, Viton, 2.362
(5) / E35000335 / O-Rings, Viton, 3-1/4 ID x 3 -1/2 OD
(1) / E35000338 / O-Ring, Viton, 5 ID
(2) / E35000340 / O-Rings, buna, 2 ID x 2-3/8 W
(1) / E35000341 / O-Ring, Viton, 1.362 x 0.103" W
(1) / E35000348 / O-Ring, Viton, 1-1/4 ID
(1) / E35000402 / O-Ring, Viton, 7-1/4 ID
(5) / E35000419 / O-Rings, flouro (Viton), 13/16" ID x 1 3/16 OD
(1) / E35000423 / O-Ring, Viton, 1.487 ID
(2) / E35000444 / O-Rings, Viton, 1-1/16 ID
(2) / E35000495 / O-Rings, Viton, 15.955 ID x .210 W 70 Duro
(4) / E35000511 / Washers, ultraseal, Viton
(1) / E41000075 / Belt, timing, 18.750 pitch, 50 teeth, 1/2 W
(4) / 280052 / -
(4) / 2549315 / Fitting elbows
(1) / 2555069 / Spring, compression
(5) / 2841015 / Pins, roll, 1/8 dia x 3/4 L x 0.028 W
(1) / E17143890 / Cap, graphite
(2) / E40000106 / Screws, shoulder, 0.156 x 5/16 L x 6-32 th
(1) / E40000134 / Spring, associated, SS
(2) / E42000078 / Bearings, 1/4 D X 1/4 L, DU14-8
(2) / E42000081 / -
(1) / E42000088 / -
(1) / E42000175 / Bearing, ball, 0.875 ID X 1.125 OD, 0.1562 W
(1) / E42000241 / Bearing, ball, radial, 1.250 bore
(1) / E42000242 / Bearing, ball, radial, .4724 bore
(1) / E42000243 / Bearing, ball, radial, 1.0625 with superlube
(2) / E43000021 / Rings, retaining, beveled, .312 shaft
(4) / E43000133 / Springs, pin
(2) / E43000210 / Dowel pins
(2) / E43000212 / Dowel pins, 3/32 x 5/16
(10) / E45000067 / Screws, set, Nylon, 10-32
(3) / E46000063 / Washers, flat, Nylon, 0.75 OD x 0.510 ID
(5) / E59000026 / -
(1) / 2100024 / Connector, MHV, receptacle, bulkhead
(6) / E17014880 / Insulators, screw, source, feedthru
(6) / E17021640 / Seals, ring, head
(6) / E17036030 / Insulator, mirror, 60 kV and 30 kV
(2) / E17165670 / -
(2) / E42000112 / Bearings, ball, .0937 ID x 0.3125 OD x 0.1406 W
(1) / E42000115 / Bearing, ball, B1-24
(3) / E42000130 / -
(1) / E51000055 / Receptacle, copper, silver Plated, high Cur
(4) / E12003620 / Connectors, ground, lamp, dual vaporizer
(30) / E17063840 / Insulators, lamp, dual vaporizer
(1) / E17027430 / -
(11) / E17063980 / Screws, lamp, insulator, dual Vaporizer
(4) / E17119720 / Standoff, short
(4) / E17119750 / Standoff, long
(4) / E42000111 / Bearings, ball, linear, LMB-1 SS
(1) / E42000164 / Bearing, needle, roller, drawn cup, 1.5000
(1) / E43000121 / Key, woodruff, CR-207
(2) / E17014682 / -
(1) / E17020280 / Shield, insulator, accelerator
(1) / E17021840 / Seal, head, spacer
(1) / E17027310 / Seal, retainer, roplat
(4) / E17037010 / Insulators, clamp, filament, bernas source
(3) / E42000074 / Bearings, ball, 0.6693 bore
(1) / E42000249 / Washer, thrust, 1.250
(2) / E42000036 / Bushings, ball, thompson Super 12
(2) / E42000082 / -
(2) / E42000106 / Bearings, KAYDON KAA-10 AG
(1) / E42000109 / Bearing, ball, 1.5 OD
(1) / E42000163 / Bearing, caged, needle, roller, 0.500 ID
(1) / E42000246 / Bearing, thrust, needle, 1.250
(2) / E42000284 / -
(1) / 6095005 / Wire, tantalum, 0.030 dia
(1) / E12005121 / Light sensor roplate
(1) / E17001611 / Shielding cup, supression feedthr
(10) / E17014680 / Insulators, multi feedthru
(1) / E17014800 / Washer, spring, filament, source
(4) / E17022890 / Tubes, lamp mounting, senslight
(5) / E17022900 / Lamps, clamp
(1) / E17036910 / Spring, filament, right hand
(1) / E17036911 / Spring, filament, left hand
(1) / E17063870 / Conductor, thermal, crucible, dual vapourizer
(1) / E17121430 / Spring, filament, right hand
(2) / E17121431 / Springs, filament, left hand
(1) / E17143770 / Rod, retaining
(1) / E17154700 / -
(1) / E17154710 / -
(4) / E40000135 / -
(1) / E40000182 / Spacer, shaft
(2) / E40000187 / -
(1) / E40000315 / Ring, retaining, internal, 0.687 housing
(2) / E43000158 / Rings, retaining, spiral, 0.625 shaft
(2) / E43000237 / Rings, retaining, E-type, 0.375 shaft
(3) / E46000064 / Washers, nylon, .429 OD x 0.275
(4) / E50000130 / Lamps, 3.5 V, 0.45 A
(2) / E51000087 / -
(14) / E51000170 / Terminal crimps male 24-30 AWG
(1) / V27000093 / O-Ring, TVL, Viton, red
(1) / E12003580 / Probe assembly, thermocouple, left, dual vapourizer
(1) / E12003581 / Probe assembly, thermocouple, right, dual vapourizer
(1) / 6095005 / Wire, Tantalum, 0.030 dia
(2) / E17025430 / Cup assemblies, gate, faraday
(2) / E17047480 / Shim, head, 0.005
(2) / E17047490 / Shims, head, 0.002
(1) / E19000270 / Belt, wafer handler, 40"
(1) / E19000271 / Belt, 30", wafer handler
(2) / E40000906 / -
(6) / E42000041 / Bearings, ball, slide car, 15 mm X 18.7 mm
(1) / E47000160 / Screw, vented, flat head, PHILIPS, 4-40
(1) / E77000033 / Wire, bare Copper, 18 Awg
(1) / E77000082 / -
(1) / E92000044 / Loctite, 242 thread lock
(1) / E92000102 / Castrol, braycote, 600 EF
(4) / E40000001 / Springs, compression
(1) / E40000089 / Spring, compression, SS
(1) / E40000090 / Screw, shoulder, 6-32 x 3/16
(4) / E40000428 / -
(5) / E34000645 / Fittings, straight, male, OneTouch
(2) / E60000015 / Lamps, incandescent, 12 V, .17 A
(4) / 242052 / -
(5) / 2115224 / -
(1) / E12005121 / Sensor, proximity
(1) / E12005132 / Motor, ropins
(4) / E17014832 / Tubes, gas, dual vaporizer
(1) / E17029380 / Plate, latch HK MTG
(1) / E32000351 / -
(1) / E42000062 / Wheel, V-Trac
(2) / E47000073 / Screws, cap, socket head, hex, 1/4-20 x 1-3
(6) / E47000085 / Screws, cap, socket head, hex, 5/16-18
(13) / E19009080 / Filaments, Bernas source, E220/E500
(14) / E17179690 / Screws, filament, Bernas
(30) / E17168272 / Insulators, filament, inner, 3-Phase
(30) / E17168280 / Nuts, insulator, outer, 3-Phase
(1) / E17014691 / Plate, arc chamber, top
(2) / E17036921 / Plates, side, arc chamber
(1) / E17036950 / Clamp, spring, filament, Bernas source
(3) / E17037064 / Shields, end plate, top, arc chamber
(3) / E17037065 / Shields, end plate, bottom, arc chamber
(1) / E17063160 / Plate, end, top, arc chamber
(1) / E17063170 / Plate, end, bottom, arc chamber
(1) / E17063190 / Plate, bottom, chamber, dual vaporizer
(4) / E17063211 / Crucibles, coated, dual vaporizer
(2) / E17063220 / Feed tube assemblies, dual vaporizer
(1) / E17063251 / Cap, crucible, coated, dual vaporizer
(5) / 3320612 / Screws, vented
(10) / 3320816 / Screws, vented, SHC, 8-32 x 1" L, SS
(20) / 3350806 / Screws, vented, buttonhead, 8-32 x 3
(2) / E12000230 / Standoff, suppression, manipulator
(12) / E17002860 / Cups, inner, shielding, manipulator
(12) / E59000003 / Standoff, ceramic, 3/8"L x 3/8"OD
(12) / E17002870 / Cups, outer, shielding, manipulator
(9) / E17014500 / Pads, spider
(1) / E17015350 / Isovalve desmodromic plata
(2) / E17026540 / Electrodes, suppression
(18) / E17045252 / Pads, pick
(24) / E17045253 / Pads, pick
(3) / E17072851 / Springs, E-clamp, ground
(1) / E17133160 / Bracket, cable
(7) / E17179690 / Screws, filament, no head
(4) / E47000166 / Screws, vented, flat head, 6-32 x 5/16
(4) / E47000309 / Screws, vented, BH, hex, 6-32 x 3/16
(21) / E46000013 / Washers, Nylon, 0.190 ID x 0.310
(2) / V27001006 / Seals, Teflon TVL
(12) / E40000188 / Washers, spring, wave, SS
(4) / E45000030 / Screws, Nylon, BH, 4-40 x 5/16
(1) / 2590279 / Fitting, 90°, 25 nm
(1) / 2595038 / Flange, vacuum, Bellows NW40
(2) / E11034700 / Feedthru assemblies, suppression, manipulator
(1) / E11050501 / Cable assembly, ropins feedthru
(1) / E12005420 / Housing, farady cup, coated
(1) / E15000201 / PCB Assembly, motion controller, arm / Lift / Scan
(1) / E15000207 / PCB Assembly, motion control
(1) / E15000320 / PCB Assembly, elevator control
(3) / E15000330 / PCB Assemblies, NC optical switch
(1) / E15000340 / PCB Assembly, no optical switch
(1) / E15000400 / Servo amplifier board
(1) / E15000420 / PCB Assembly, extender, linear motor
(2) / E15001650 / PCB Assemblies, digital output, 24
(1) / E15001670 / PCB Assembly, gas flow control
(2) / E15002390 / PCB Assemblies, control Board, multi VAC gauge
(1) / E15002090 / PCB Controller, power Supply
(1) / E15002391 / PCB Assembly, vacuum, gauge, control Board
(1) / E15005180 / PCB Assembly, sqm, light, link, interface
(1) / E16008000 / Light link assembly, terminal, computer
(1) / E16008020 / Term-light link assembly
(1) / E16008050 / Light link assembly, terminal, 17 U-16 D
(1) / E16008130 / Terminal light link assembly
(1) / E16008251 / Cable, terminal light link assembly
(1) / E16089651 / Cable assembly, ribbon, sqm option
(1) / E17061280 / Aperture, support, resolving, 60 kV
(1) / E17123251 / Shield, roplat
(1) / E18001300 / Gauge, Go-No-Go, platform alignment
(1) / E18001310 / Pick, alignment
(1) / E18001390 / -
(1) / E18001400 / -
(1) / E18001430 / Tool, pick alignment
(1) / E30000038 / Filter, PCS, mixed bed oxygen removal, 1/2
(1) / E30000039 / Filter, PCS, mixed bed, 1/2
(1) / E30000060 / Strainer, in-line, 3/4" NPT, 19"².
(1) / E32000194 / Valve, flow Control, SS, with KEL-F tip
(1) / E33000033 / Transducer, pressure, 100 mm Hg
(2) / E33000182 / Gauges, tube, cold cathode, with baffle
(1) / E35000507 / Seal, fluorology, G, 1.375 OD
(4) / E51000094 / Connectors, fiber, optic, duplex
(20) / E51000095 / Connectors, fiber optic, gray
(20) / E51000096 / Connectors, fiber optic, blue
(1) / E78000138 / Tube, vent, corr, TFE, 42"
(1) / E78000179 / Tube, spiral Exhaust, with KF40 and 1-1/4 NPT
(1) / E17008110 / Tube, spiral exhaust, with KF40 and 1-1/4 NPT
(1) / E17020820 / Plate, setup supressor
(1) / E17023041 / Aperture, source, housing
(1) / E17023050 / Gate, focusfara, faraday
(1) / E17024181 / Sheild, beam, target-entrance
(1) / E17026530 / Plate, mounting, suppression electrode
(1) / E17026610 / Plate, faraday
(1) / E17026680 / Plate, ground, graphscan
(1) / E17026690 / Plate, ground, rear, graphscan
(1) / E17026720 / Plate, ground, graphscan-Scan
(1) / E17030530 / Mirrorpart
(6) / E17036410 / Liners, graphite, dipole
(1) / E17039040 / Aperture, exit, dipole
(1) / E17045790 / Aperture, post scan assembly
(4) / E17046560 / Screws, graphite, 1/4-20, post-scan assemblies
(1) / E17061270 / Plate, ground, mirror, 60 kV
(1) / E17063251 / Cap, crucible, coated, dual vaporizer
(1) / E17079880 / Aperture, dual, 2-step reducer 
(2) / E17079910 / Shields, graphite, 2-step reducer
(1) / E17103110 / Plate, scanner, front, ground
(2) / E17106820 / Stop, beam dump, neutral
(1) / E17119390 / Target, extension
(1) / E17120450 / Shield, side wall
(2) / E17120770 / Shield, back wall, full target
(1) / E17122270 / Shield, traveling, faraday
(1) / E17123251 / Shield, roplat
(13) / E17143890 / Caps, graphite
(1) / E17145700 / Shield, analyzer, long, upper, graphite
(1) / E17145710 / Shield, analyzer, long, lower, graphite
(1) / E17145720 / Shield, analyzer, short, upper, graphite
(1) / E17145730 / Shield, analyzer, short, lower, graphite
(2) / E17165250 / Shield, faraday, gate, thin, graphite
(3) / E37000196 / Maintenance kits, 525 cold cathode Ion
(2) / 4340400 / Bernas source assemblies, dual. 

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  Hope you are doing well. Our client is releaseing DATACON / BESI 2200 APM+ Die bonder immediately. They would like to move this tool out within two weeks so can make rooms for their new tools.  Please let me know if you are interested. The owner is open to all reasonable offers. DATACON / BESI 2200 APM+ Die bonder Power supply: 3 x 400 V+N+PE U-nominal: 3 x 400 V, 50/60 Hz I-nominal: 2.7 A, 1.9 kVA Vacuum: -0.8 (bar), 1.5 Nm³/h) Compressed air: 6.0 (bar), 20.0 (l/min) Nitrogen: 1.0 (bar), 1.0 (l/min) 2006 vintage.

(4) Units DNS / DAINIPPON WS-820C and WS-820L

Our supplier is releasing 2 Units DNS / DAINIPPON WS-820C and 2 units DNS / DAINIPPON WS-820L for sale. They are asking only $68k per unit, and would consider reasonable offers for the lot of 4 units.  These units were taken our of a fab and are currently in storage.  Please review the photos taken by our CAE Inspection Team. DNS / DAINIPPON WS-820C Wet station Load CHCL Shower N2 blow DHF Q Etch EDR IPA Dryer Unload 1995 vintage.

SiC功率器件制造的顶峰。目前韩国正在进行大量投资

要发展SiC,半导体供应链的多个领域必须无缝地结合在一起,以协同达到大规模具有成本竞争力的SiC功率器件制造的顶峰。目前韩国正在进行大量投资,各SiC器件生产商、IDM、纯代工厂、设备制造商,乃至大学、研究院所齐出力,共同开发SiC。 近日,韩国30家本土半导体企业以及大学和研究所将于4月14日组建碳化硅产业联盟,以应对急速增长的碳化硅(SiC)、氮化镓(GaN)、氧化镓(Ga 2 O 3 )等宽禁带半导体所引领的新型功率半导体市场,从而形成韩国本土碳化硅生态圈。据悉,联盟内的30家韩国功率半导体企业将共同参与材料、零部件、设备用功率半导体的开发,培育与碳化硅半导体相关的材料、零部件和设备企业的发展。那么韩国在SiC领域的储备和配套如何呢? SiC产业链 SiC的产业链主要由单晶衬底、外延、器件、制造和封测等环节构成。 在这些环节中,SiC衬底是发展SiC的关键。衬底是将高纯度多晶SiC粉末经过升华、晶体生长、切割、研磨、清洗等过程制造而成的晶圆,为薄片形态。为使材料能满足不同芯片的功能要求,需要制备电学性能不同的SiC衬底,主要是两种:低电阻率的导电型SiC衬底,和高电阻率的半绝缘型SiC衬底。 但衬底是不能直接拿来制造大功率和高压高频器件,而必须在单晶衬底上额外沉积一层高质量的外延材料,并在外延层上制造各类器件。在抛光晶圆上采用真空蒸发的方式形成几微米厚度的新的碳化硅单晶层,这就是外延片。几乎所有SiC功率器件的制备均是基于高质量SiC外延片,外延技术对于碳化硅器件性能的充分发挥具有决定性的作用。 在导电型SiC衬底上生长SiC外延层制得的SiC外延片,可进一步制成功率器件,功率器件是电力电子行业的重要基础元器件之一,广泛应用于电力设备的电能转化和电路控制等领域。在半绝缘型SiC衬底上生长氮化镓外延层制得的SiC基氮化镓(GaN-on-SiC)外延片,可进一步制成微波射频器件,微波射频器件是实现信号发送和接收的基础部件,是无线通讯的核心,主要包括射频开关、LNA、功率放大器、滤波器等器件。 接下来的流程就跟硅基半导体类似,进行制造、封测到最终出来各种各样的SiC器件。 韩国SiC产业链布局情况 在 衬底 领域,韩国的SK Siltron是主要的SiC衬底厂家。2021年2月,SK Siltron宣布已开始生产少量的碳化硅衬底晶片。据日媒《亚洲经济》2月16日报道...