1. AMAT P5000
Process: Poly Etch
Config:
*2xCH:MxP
*ESC Chuck
*Endpoint
*Gate valve
*Throttle valve
*Edwards C301Turbo Pump
*AMAT-0 H/E
*OEM12B RF Gen
Our User supplier is releasing a PLASMA ETCH PE-100. Please see relevant information below, the PC is not included Is the system in running condition, with a pump? There is no pump with this tool. The PE100 was in working condition when decommissioned. We'll try to hook up a pump and test the unit still works and advise in a day or so. How many kHz? Or 13.56MHz? 13.56 MHZ, 0 - 300 W PC included? We do not have the PC, but any m/c with WIN7 or higher should work. We can supply the software installation files. Any known issues? Tool was in working condition before decommissioning Asking price? £15.000 plus transport costs
Comments