我公司最近要釋出一台AMAT P5000 CVD 8”，上個月剛檢查完設備，
先前貴公司詢問過相關設備，目前是否還有這個需求？
AMAT / APPLIED MATERIALS P5000 CVD System, 8"
VME Type: Hard disk
21-Slots controller
SBC Board type: V21 Synergy
VGA Video board
Robot type: Phase-III
8-Slots storage elevator
No WPS sensor
Standard slit valve
Heat exchanger
Floppy Disk Drive (FDD): 3.5"
Standard cassette handler
I/O Wafer sensor
No Load lock slow vent
Load lock purge
Exhaust line type: Top, standard
Gas panel: (28) Gas lines
Chamber type:
Chamber A: Universal CVD
Chamber B: Standard CVD
Chamber A, B:
Process: PECVD Oxide
Process kit: Susceptor
MKS Manometer, 100 Torr
Clean method: RF Clean
Throttle valve: Direct drive dual spring W/C plug
Gas box MFC: AERA
Lamp driver
ENI OEM-12B RF Generator
RF Match: Phase-IV
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