My client is releasing the KLA / TENCOReS32 from their fab to have space for new tool that will be coming in Q4 soon.
Detail configuration and pictures can be reviewed from below:
KLA / TENCOR eS32 E-Beam inspection system, 8"-12"
Chambers
Panels
SECS / GEM
User interface: Image and main computer
Process exhaust: ACDEXH
Process water: PCW
Mechanical:
HPCDA
PN2
PVAC
Power:
NPWR: 208-120 V
NPWR: 230 V
NPWR: 400 V
2006 vintage.
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