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 ASM Epsilon E2000+ EPI Reactor, 4"-8"

Process: SiGe

Gate valve type: VAT

RIKEN KEIKI Gas monitor

Vacuum load lock option

Chamber

Sidecar system included

Frequency: 50 Hz

Gas type:

Silicon source

(2) Dopant mixers (PH3/B2H6)

GeH4

DCS

N2

H2

HCL

2011 vintage.