ASM Epsilon E2000+ EPI Reactor, 4"-8"
Process: SiGe
Gate valve type: VAT
RIKEN KEIKI Gas monitor
Vacuum load lock option
Chamber
Sidecar system included
Frequency: 50 Hz
Gas type:
Silicon source
(2) Dopant mixers (PH3/B2H6)
GeH4
DCS
N2
H2
HCL
2011 vintage.
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