I am looking for a unit of ion implanter, VARIAN VIISion 80, 6" or 8" on behalf of my client. A complete unit would be the best but they are fine with part tool as well since they have engineers onsite who are experts to this model. They would like to know the following details as well:
1. Is the end station CES or UES?
2. What is the sub-model? HP, HC, HCP, HCS
3. What pumps does it have?
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