富兆的有二台Endura 5500,規格如下:
CH-A : Pass Through
CH-B : Cool
CH-C & D : None
CH-E & F : Orient Degas
CH-1 : Process : AL /Standard Chamber Body/Standard Heater & Clamp
CH-2 : Process : Ti & TiN /Wide Chamber Body/Standard Heater & Clamp
CH-3 : Process : Ti & TiN /Wide Chamber Body/Standard Heater & Clamp
CH-4 : Process : AL /Standard Chamber Body/Standard Heater & Clamp
沒SMIF POD,一般6" 是 Open cassette。SMIF用在8寸的
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